Simulation of Semiconductor Processes and Devices 1998

Simulation of Semiconductor Processes and Devices 1998

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This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: a€c semiconductor equipment simulation a€c process modeling and simulation a€c device modeling and simulation of complex structures a€c interconnect modeling a€c integrated systems for process, device, circuit simulation and optimisation a€c numerical methods and algorithms a€c compact modeling and parameter extraction a€c modeling for RF applications a€c simulation and modeling of new devices (heterojunction based, SETa€™s, quantum effect devices, laser based ...)technology development engineer will use the tools as naturally and successfully as a circuit designer uses SPICE simulation and ... [4] aquot;TSUPREM-4, Two- dimensional process simulation program, aquot; Version 6.5, Usera#39;s Manual, Technology Modeling Associates, May, 1997. ... 270, pp. 584-585, San Diego, CA , 1995. [13] D. Tang, P. Wang, V. Speriosu, S. Le, R. Fontana, and S. Rishton, aquot;An IC processanbsp;...

Title:Simulation of Semiconductor Processes and Devices 1998
Author: Kristin De Meyer, Serge Biesemans
Publisher:Springer Science & Business Media - 2012-12-06

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